[PDF.57ks] Metallization: Theory and practice for VLSI and ULSI

Metallization: Theory and practice for VLSI and ULSI

[PDF.ob05] Metallization: Theory and practice for VLSI and ULSI

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 | #4524916 in Books |  Butterworth-Heinemann |  1992-12-17 | Original language:English | PDF # 1 |  10.50 x7.50 x.75l, | File type: PDF | 250 pages

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||0 of 0 people found the following review helpful.| Useful|By Mirko|If you work in semiconductor process, that you will really appreciate this book. It take into account almost all aspects of metallization, specially growth, mechanical and electrical properties. Something on the lithography would have make it perfect, but that do not diminish the value of this book.

This title covers fundemental concepts, properties and applicabilities of metals and alloys for use in various metallization schemes. Metallizations form the key components on electronic circuits - controlling device properties and providing power and device interconnections with the outside world or with other devices.


The recent advent of submicron dimensions and increasingly faster devices in the semiconductor have challenged researchers to keep metallizat...

You can specify the type of files you want, for your device.Metallization: Theory and practice for VLSI and ULSI   |  Shyam Murarka. Just read it with an open mind because none of us really know.

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