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Digest of Papers Microprocesses and Nanotechnology 2000: 2000 International Microprocesses and Nanotechnology Conference July 11-13, 2000 Tokyo, Japan

Japan) International Microprocesses and Nanotechnology Conference (2000 : Tokyo




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 | #12118431 in Books |  2001-11 | Original language:English |  10.75 x8.75 x.75l, | File type: PDF | 230 pages

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The papers in this volume are the proceedings of the International Microprocesses and Nanotechnology Conference held in 2000. They cover: lithography technology; nanofabrication techniques and nanodevices; microsystem technology; resists and processes; instruments; and more.



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